| 引用本文: | 刘荣军,周新贵,张长瑞,等.炉温对化学气相沉积SiC涂层组成及显微结构的影响.[J].国防科技大学学报,2002,24(6):23-26.[点击复制] |
| LIU Rongjun,ZHOU Xingui,ZHANG Changrui,et al.Effect of Furnace Temperature on the Composition and Microstructure of SiC Coatings by CVD[J].Journal of National University of Defense Technology,2002,24(6):23-26[点击复制] |
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| 炉温对化学气相沉积SiC涂层组成及显微结构的影响 |
| 刘荣军, 周新贵, 张长瑞, 曹英斌 |
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(国防科技大学 航天与材料工程学院，湖南 长沙 410073)
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| 摘要: |
| 采用SEM、EDX、XRD测试手段对沉积炉壁产物进行了分析，结果表明：低温区沉积的SiC涂层全为β-SiC；高温区SiC涂层中含有少量的游离态Si和α-SiC；高温区SiC颗粒的形核和生长速率大于低温区；所以温度是影响化学气相沉积SiC涂层组成及显微结构的主要因素。 |
| 关键词: 炉温梯度 化学气相沉积 SiC涂层 |
| DOI： |
| 投稿日期：2002-07-19 |
| 基金项目:国家部委重点项目资助(41312011002) |
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| Effect of Furnace Temperature on the Composition and Microstructure of SiC Coatings by CVD |
| LIU Rongjun, ZHOU Xingui, ZHANG Changrui, CAO Yingbin |
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(College of Aerospace and Materials Engineering, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| SEM, EDX and XRD were applied to analyze SiC coatings deposited on the CVD furnace wall. The results show that the coatings consist of pure β-SiC in the lower-temperature block; however, there exist a few Si and α-SiC in the CVD SiC coatings within the higher-temperature block; the nucleation process and growth rate of SiC particles in the higher-temperature block are faster than that of the lower-temperature block; therefore, we can be sure that temperature is the main effect on the composition and microstructure of CVD SiC coatings. |
| Keywords: furnace temperature gradient CVD SiC coatings |
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