This paper discusses the 3-point error separating technique for on-line measurement of straight line error motion of an ultra-precision lathe and straightness of the generatrix of turned works. The accuracy of the measuring system is obtained about 土0.078μm (土3σ). Furthermore,a closed loop,micro-computer control system is built up to process the error data and excite a servo-mechanism for Compen sating the error motion,and the straightness of the turned work is increased to 0.5μm/160mm,that is,Compensating increases straightness by 50%,at least than before compensating.
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王浩藩,潘仲明,梁建成.超高精度车床直线运动误差检测与补偿系统的理论与实验研究. A Research on the Measurement and Compensation of the Straightline Error Motion of an Ultra Precision Lathe[J].国防科技大学学报,1987,(4):1-10.