A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers. The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum (ES) of the measured signal. Simulations show excellent agreement between estimated and actual values.
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李素芝,杨建华.精确测量薄层厚度的同态信号处理方法[J].国防科技大学学报,1994,16(2):77-81. Li Suzhi, Yang Jianhua. A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers[J]. Journal of National University of Defense Technology,1994,16(2):77-81.