具有C轴取向Al3+掺杂型ZnO薄膜的溶胶-凝胶法制备及其性能研究
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湖南省自然科学基金资助项目(10JJ4045);国防科技大学校预研资助项目(JC08-01-06)


The study on the preparation of AlThe study on the preparation of Al3+ doped ZnO thinfilms with [002] oriented by sol-gel method and its propertiesdoped ZnO thin films with [002] oriented by sol gel method and its properties
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    摘要:

    以乙二醇甲醚为溶剂,采用Sol-Gel法制备出具有C轴取向、可导电的Al3+,离子掺杂ZnO透明薄膜,并利用场发射扫描电镜、X-射线衍射、能谱分析、标准四探针和反射光谱仪等对薄膜的组成、结构和光学性能进行了分析。结果表明:Al3+离子掺杂ZnO薄膜为六方纤锌矿型结构,由六棱柱状阵列构成,具有C轴择优取向;薄膜电阻率随Al3+离子掺杂浓度的升高而降低;在可见光区域,薄膜透光率随Al3+离子掺杂浓度的升高而降低,掺杂3% ZnO薄膜的透光率达到90%左右,禁带宽度为3.25 eV,具备制作薄膜太阳能电池透明导电电极材料的应用价值。

    Abstract:

    The aluminum-doped ZnO thin films with [002] oriented were prepared using 2-methoxyethan as a solvent system by the sol-gel method. The composition, structure and optical properties were studied by means of Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD), Energy-dispersive X-ray microanalysis (EDX) and Spectral shape. The results showed that the ZnO films are hexagonal wurtzite structure, which consists of hexagonal rods growing along C axis. The resistivity of the aluminum-doped ZnO thin films decreases with the increase of the content of Al3+.In the visible region, the light transmittance of the ZnO thin films with 3% aluminum is about 90%, and the band gap is about 3.25 eV, which can meet the material requirements for photoelectric devices such as photovoltaic solar cell.

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郑春满,宋植彦,魏海博,等.具有C轴取向Al3+掺杂型ZnO薄膜的溶胶-凝胶法制备及其性能研究. The study on the preparation of AlThe study on the preparation of Al3+ doped ZnO thinfilms with [002] oriented by sol-gel method and its propertiesdoped ZnO thin films with [002] oriented by sol gel method and its properties[J].国防科技大学学报,2012,34(3):33-37.

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  • 收稿日期:2011-06-22
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  • 在线发布日期: 2012-08-28
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