Nano-precision optical surfaces are highly demanded in fields of lithography, synchrotron radiation, space observation and inertial confinement fusion. With the performance rising of equipment, the surface accuracy and roughness of optical elements are further strictly required, which is approaching the theoretical physical limitation. The rising demands bring about tougher challenges for optical fabrication, and push the technology to the frontier in the nano-precision fabrication area as well. Magnetorheological polishing and ion beam were figured in this research: the stability of material removal rate in nano-level, controllable compensation of complex asphere and dynamics design of equipment axes. The self-developed innovation polishing equipment was produced and the nano-precision fabrication of typical optical elements was realized, which provides strong support for relative science programs of our country, in terms of fabrication technology.