A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers
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    Abstract:

    A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers. The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum (ES) of the measured signal. Simulations show excellent agreement between estimated and actual values.

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History
  • Received:November 25,1993
  • Revised:
  • Adopted:
  • Online: January 23,2015
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