Abstract:Twist-roller friction drive system combining friction drive with screw drive, has many features such as good dynamic characteristic of friction drive and small lead of screw drive. This paper presents a kind of twist-roller friction drive system. Its lead is less than 0.2mm, the stroke is about 250mm, and the resolution is several nanometer. It is composed of twistroller friction drive mechanism, static air bearing guideway and relative parts. It is a new kind of drive system with large stroke and very high resolution.