Abstract:Using Low-molecular organosilazane[(CH3)2NHN]n as precursor, which is reaction product between (CH3)2SiCl2 and N2H4, Si/C/N ultrafine composite powder was synthesized by vapor reaction decomposition. The pyrolysis mechanism and reaction mechanism of gas-phase precursor under H2, NH3 atmosphere and the influence of the pyrolysis conditions(pyrolysis temperature, gas flowing rate, H2/NH3 ratio) on the morphological characteristics, the composition of the powder were discussed. Nano-powder is amorphous with 16.49%～26.75% Nitrogen, the least particle size about 40 nm.
