Abstract:The configuration and control system of a linear long stroke and high frequency fast axis servo (FAS) is developed for the production of asymmetric optics. The maximum stroke of the FAS is 30mm. The proposed Fast Axis Servo (FAS) utilizes the aerostatic bearings driven by a voice coil actuator, a custom linear current amplifier, a high-resolution encoder and a high-speed control system. The static and dynamic characteristic of air slide with different cross-sectional shapes was studied by the finite element method. A control strategy consists of a proportional, integral and derivative (PID) feedback controller and velocity/acceleration feed forward controller was implemented to accommodate the changed system dynamics. The 0.1mm step response was applied on the FAS, the rise time is 2ms, the over shoot is 0.4%, the settling time is 4ms. An aluminum part with the super precision cutting has a surface finish value 24nm Ra. The experiment results indicate that the FAS displays satisfactory dynamic and cutting performance.