Abstract:How to realize the high-precision measurement of the shape and position errors of the cuboid optical element and how to use the measurement data to correct these errors are the main problem in the manufacturing process. A shape and position errors measurement method of the cuboid optical elements based on the wave-front interference theory was presented and the measurement system with large aperture instrument and high-precision indexing plate was built. With the help of this system, the parallelism and verticality measurement of the cuboid optical element in the accuracy of 1μm/400mm was achieved and the high-accuracy integrated distribution data of shape and position errors were obtained. The high-accuracy machining of this kind of optical element was achieved by using modern optical machining technology as magnetorheological finishing and computer controlled optical surfacing.