Abstract:In order to improve the wear resistance and corrosion resistance of the soft copper substrate, the protective multi-layer diamond-like carbon film on the copper substrate was prepared by the pulsed laser deposition. The silicon carbide / diamond-like carbon cyclic layer was used to avoid the accumulation of internal stress in the diamond-like carbon layer and to reduce the risk of rupture of the functional diamond-like carbon layer. The individual silicon carbide layer reduced the hardness difference between the soft copper substrate and the hard diamond-like carbon layer. The titanium layer made the copper substrate combined with the upper silicon carbide layer firmly. Experimental tests show that the protective multi-layer diamond-like carbon film can adhere firmly on the copper substrate, and can be tested by heavy friction and adhesive adhesion as stipulated in the MIL-48497A and the temperature impact test by GJB150.5A-2009. At the same time, it can withstand the corrosion of weak alkali solution; the friction coefficient of the protective film is low and below 0.093, and the wear resistance is good for 2 hours. The multi-layer technics can be used as anti-wear film for mechanical tools in the corrosive environments after being improved for different substrates.