The microstucture arrays are widely used in the fields of LED lighting, liquid crystal display and optical instruments. Due to the tiny and complex structure and the high requirements of figure and surface quality, the study on the process technology of microstructures causes wide attention. A FTS (fast tool servo) device with the combination of piezoelectric ceramics actuator and flexible hinge holder was presented. The electro-mechanical coupled model of the FTS system was established and the effect of the system parameters on the system behaviors was investigated. The optimization of the structure parameters of flexible hinge holder was performed on the basis of the finite element simulation. The linearity of the output displacement of the tool was measured by laser displacement sensor. Finally, the microstructure of sinusoidal grids on the cylindrical surface of red copper was processed with the FTS and ultra-precision turning machine, and the machining results indicate that the designed FTS is able to accurately and effectively process the microstucture arrays with complex structure.