The basic principle of microaccelerometers is explained and several kinds of them with different structures are investigated, including piezoelectric type, capacitive type, torsional-cantilever type, tunneling type, etc. The characteristics of those types are introduced. Some focused problems are pointed out. Furthermore, several methods and advices are offered to improve the property of microaccelerometers.
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李圣怡,刘宗林,吴学忠.微加速度计研究的进展[J].国防科技大学学报,2004,26(6):34-37. LI Shengyi, LIU Zonglin, WU Xuezhong. Developments of Microaccelerometer Research[J]. Journal of National University of Defense Technology,2004,26(6):34-37.