Feasibility of hole-drilling method for the measurement of residual stresses in short carbon fiber enhanced silicon carbide (C/SiC) composites was studied. Based on the disadvantage of conventional hole-drilling method and good electric conductance of high-hardness C/SiC composite, electric sparkle method (ESM), an alternative method, was presented and proved suitable. Then an experimental procedures for residual stresses of C/SiC composites were established. Finally the established ESM method was used for the measurement of residual stresses in two C/SiC samples with different machined surface. Results show that difference of residual stresses between two samples displays good distinguishing ability of the ESM method. Less intrinsic residual stresses and mechanically introduced residual stresses bring the advantage of surface figure stability for C/SiC composites used for reflecting mirror.