水导激光加工单晶金刚石的特性及材料蚀除机理
DOI:
作者:
作者单位:

哈尔滨工业大学机电工程学院

作者简介:

通讯作者:

中图分类号:

TN249

基金项目:

国家科技重大专项(2019-VII-0009-0149),国家重点研发计划(2021YFF0500200),航空科学基金(2024M055077001)


Research on water-jet guided laser ablation behavior of single-crystal diamond
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献()
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    针对单晶金刚石因高硬度、高脆性以及熔点高导致精密加工困难的问题,提出了一种水导激光加工方法,并对单晶金刚石的水导激光蚀除行为进行了系统研究。水导激光加工所用光源为纳秒激光,其材料蚀除机理源于激光的热效应以及高速射流的冲刷冷却。基于热力学第一定律,结合射流冲击冷却原理,建立了水导激光蚀除单晶金刚石的光热作用模型,分别针对单晶金刚石材料单脉冲作用下表面温度场随时间演变规律及多脉冲作用下表面蚀除形貌的变化规律进行了研究。并结合单点冲击、划槽实验验证了理论仿真结果的准确性。在此基础上,对比了单一纳秒激光与水导激光刻划单晶金刚石材料后沟槽形貌差异,阐明了水导激光加工单晶金刚石的特性及材料蚀除机理。

    Abstract:

    To address the inherent challenges in the precision machining of single-crystal diamond, which arises from its intrinsic properties of extreme hardness, high brittleness, and elevated melting point, a water-jet guided laser(WJGL) processing technique was proposed. with a comprehensive examination of the ablation dynamics of single-crystal diamond under this method. The nanosecond laser employed in WJGL processing serves as the primary energy source, with material ablation governed by the combined thermal effects of laser irradiation and the cooling influence of high-velocity water jet flushing. Underpinned by the first law of thermodynamics and the principles of jet cooling, a photothermal model was established to capture the laser ablation behavior of single-crystal diamond in the WJGL context. Detailed investigations were conducted into the temporal evolution of surface temperature under single-pulse conditions, as well as into the morphological changes in ablation patterns under multi-pulse exposure. The validity of the theoretical simulations was confirmed through single-point impact and linear scribing experiments. Comparative analysis of groove morphologies created by single laser versus WJGL scribing further elucidates the unique characteristics and material removal mechanisms inherent to WJGL processing of single-crystal diamond.

    参考文献
    相似文献
    引证文献
引用本文
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2024-09-27
  • 最后修改日期:2025-04-10
  • 录用日期:2024-12-17
  • 在线发布日期:
  • 出版日期:
文章二维码