大行程高谐频柔顺纳米定位技术综述
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上海交通大学 机械系统与振动全国重点实验室

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TP215

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国家自然科学基金资助项目(52335010),流体动力基础件与机电系统全国重点实验室开放基金课题资助(GZKF-202522)


A review of long-range high-resonant-frequency compliant nanopositioning technology
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    摘要:

    随着科学研究和工业生产对纳米级精度的需求日益增长,能够生成和控制纳米级精度运动的柔顺纳米定位技术已成为高端装备的关键支撑。定位行程和谐振频率主导着纳米定位系统的工作空间和响应速度,但二者间存在原理性的矛盾,难以兼顾。本文以大行程、高谐频柔顺纳米定位技术为研究对象,从系统构成、关键性能指标等方面介绍了行程与谐频间矛盾问题的内在机制,并从基于不同致动方式的纳米定位器设计、相关控制问题及控制方法等方面介绍了国内外研究学者为解决这一问题所开展的探索与实践,分析了研究现状并讨论了发展趋势,为我国高端装备与精密仪器的发展提供了有益参考。

    Abstract:

    With the growing demand for nanometer-scale precision in scientific research and industrial production, compliant nanopositioning technology capable of generating and controlling motion with nanometer-level precision has emerged as a key enabler for high-end equipment. The positioning range and resonant frequency determine the workspace and dynamic response of nanopositioning systems. However, there exists an inherent trade-off between them, making it difficult to optimize both simultaneously. This paper focuses on the compliant nanopositioning technologies for achieving long range and high resonant frequency. From the perspectives of system configuration and key performance indicators, the intrinsic mechanism underlying the trade-off between positioning range and resonant frequency was introduced. Furthermore, the efforts and practices of researchers worldwide in addressing the trade-off, including the design of nanopositioners based on different actuation methods, as well as related control issues and control strategies, were reviewed. The current research status was analyzed, and future development trends were discussed, providing useful references for the advancement of high-end equipment and precision instruments in our country.

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历史
  • 收稿日期:2025-12-09
  • 最后修改日期:2026-03-31
  • 录用日期:2026-04-07
  • 在线发布日期: 2026-04-17
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