| 引用本文: | 彭传才,金昭廷,谢淑云.低成本低损耗微波集成电路新工艺-FeCr Al-Cu-Cu-Au 金属系统.[J].国防科技大学学报,1982,(2):71-78.[点击复制] |
| Peng Chuancai,Jin Zhaoting,Xie Shuyun.A New Technology of Microwave Integrated Circuit with Low Cost and Low Loss-Metal System FeCrAl-Cu-Cu-Au[J].Journal of National University of Defense Technology,1982,(2):71-78[点击复制] |
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| 低成本低损耗微波集成电路新工艺-FeCr Al-Cu-Cu-Au 金属系统 |
| 彭传才, 金昭廷, 谢淑云 |
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| 摘要: |
| 本文提出了FeCrAl-Cu-Cu-Au金属系统制造微波集成电路的新工艺。实验研究表明，该金属系统具有一系列优良的物理特性，用它制造微波集成电路不仅性能优良，而且成本很低。 |
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| 投稿日期：1982-02-08 |
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| A New Technology of Microwave Integrated Circuit with Low Cost and Low Loss-Metal System FeCrAl-Cu-Cu-Au |
| Peng Chuancai, Jin Zhaoting, Xie Shuyun |
| Abstract: |
| A new technology of microwave integrated circuits made from the metal system FeCrAl-Cu-Cu-Au is presented. The experimental investigation showed that the metal system exhibits a lot of excellent physical properties. Microwave integreted circuits produced from this metal system are not only hígh-grade in quality，but also quite low in cost. |
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