| 引用本文: | 陈哲,高伯龙,石秀瑜,等.混合物薄膜折射率与膜孔洞率关系研究.[J].国防科技大学学报,1990,12(1):52-58.[点击复制] |
| Chen Zhe,Gao Bolong,Shi Xiuyu,et al.The Study of the Relations Between Refractive Index and Porosity in Mixed Films by Coevaporation[J].Journal of National University of Defense Technology,1990,12(1):52-58[点击复制] |
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| 混合物薄膜折射率与膜孔洞率关系研究 |
| 陈哲, 高伯龙, 石秀瑜, 王纪武 |
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(应用物理系)
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| 摘要: |
| 本文对TiO2 和Ta2O5混合膜进行了单源共蒸发实验研究。在实验结果的基础上，提出了一个拟合TiO2、Ta2O5混合膜系孔洞率的经验公式，并对混合膜的折射率的计算过程进行了改造。结果表明：理论计算与实验数据符合较好；混合物薄膜可能形成孔洞率较小的膜层，从而导致混合物薄膜折射率随混合百分比的变化曲线出现峰值。 |
| 关键词: 混合物薄膜，折射率，孔洞率，TiO2，Ta2O5 |
| DOI： |
| 投稿日期：1988-12-19 |
| 基金项目: |
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| The Study of the Relations Between Refractive Index and Porosity in Mixed Films by Coevaporation |
| Chen Zhe, Gao Bolong, Shi Xiuyu, Wang Jiwu |
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(Department of Applied Physics)
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| Abstract: |
| In order to further understand the relations between refractive index and porosity in mixed films，We did the experiments of mixed film system TiO2:Ta2O5, using coevaporation. On the basis of our experimental results，we
put forward an empirical porosity expression to fit the data of TiO2:Ta2O5 system，and we also improved the calculating procedure of the refractive index of mixed films. The results of theoretical calculations using our empirical porosity expression agree with those of experiments. The results of experiments and theoretical analysis show that it is possible that the mixed films have less porosity than pure thin films，and those films cause a peak in the curve of refractive index of mixed films versus the ratio of the mixed weight. |
| Keywords: refractive index,mixed films,porosity,TiO2, Ta2O5 |
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