| 引用本文: | 李红燕,李均.数字式电容测微仪的研制.[J].国防科技大学学报,1992,14(2):22-26.[点击复制] |
| Li Hongyan,Li Jun.The Digital Capacitive Instrument for Measuring Micro-Displacement[J].Journal of National University of Defense Technology,1992,14(2):22-26[点击复制] |
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| 数字式电容测微仪的研制 |
| 李红燕, 李均 |
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(精密机械与仪器系)
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| 摘要: |
| 本文研制了一种用于微位移和振动测量的新型仪器——数字式电容测微仪，介绍了它的工作原理、性能指标以及特点，分析了电容传感器两极板不平行对测量精度的影响程度。测试表明该仪器具有体积小、精度高、成本低等优点，具有广泛的应用前景。 |
| 关键词: 微位移，电容传感器，测量 |
| DOI： |
| 投稿日期：1991-06-05 |
| 基金项目:国家自然科学基金资助项目 |
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| The Digital Capacitive Instrument for Measuring Micro-Displacement |
| Li Hongyan, Li Jun |
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(Department of Precision Machinery and Instrument)
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| Abstract: |
| A new type of precision digital capactive，we instrmnent is developed for measuring micro displacement and vibration. In this paper，its measuring principle，specifications and features are described in detail. The effect of the angle between two electrode planes of capacitive sensor on the measuring result is also analysed in it. This instrument may have the advantage of small size, low cost and high accuracy，as well as wide future. |
| Keywords: micro-displacement,capacitive sensor,measurement |
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