引用本文: | 王世民,梁建成.超精密加工在线检测与误差补偿的理论与方法.[J].国防科技大学学报,1994,16(2):8-14.[点击复制] |
Wang Shimin,Liang Jiancheng.Theory and Methods of On-line Measurement and Error Compensation of Ultraprecision Machining[J].Journal of National University of Defense Technology,1994,16(2):8-14[点击复制] |
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超精密加工在线检测与误差补偿的理论与方法 |
王世民, 梁建成 |
(国防科技大学 机械电子工程与仪器系 湖南 长沙 410073)
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摘要: |
超精密加工技术是高新技术、现代机械、电子产业以及国防工业的重要支柱,已成为技术发达国家重要的竞争目标。我系自 1982 年以来开展超精密加工技术的研究已有十多个年头了,取得了重要进展和重大突破。本文就所进行的研究工作,综合介绍了超精密加工中的若干理论与方法,包括形状误差在线检测的误差分离、误差补偿控制、微进给机构的非线性建模、微位移检测等内容,最后介绍了我系所取得的主要成果。 |
关键词: 超精密加工 在线检测 误差分离 补偿控制 |
DOI: |
投稿日期:1993-09-25 |
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Theory and Methods of On-line Measurement and Error Compensation of Ultraprecision Machining |
Wang Shimin, Liang Jiancheng |
(The Department of Mechantronics and Instrumentation,NUDT,Changsha,410073)
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Abstract: |
Some theory and methods in ultraprecision machining are presented. Error separation and error compensatory control of roundness,straightness and cylindricity are included. And nonlinear modeling of micro-driven equipment and micro-displacement measurement are also comprised. Finally some main achievements in scientific research are briefly introduced. |
Keywords: ultraprecision machining on-line measurement error separation compensatory control |
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