| 引用本文: | 李素芝,杨建华.精确测量薄层厚度的同态信号处理方法.[J].国防科技大学学报,1994,16(2):77-81.[点击复制] |
| Li Suzhi,Yang Jianhua.A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers[J].Journal of National University of Defense Technology,1994,16(2):77-81[点击复制] |
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| 精确测量薄层厚度的同态信号处理方法 |
| 李素芝, 杨建华 |
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(国防科技大学 电子技术系 湖南 长沙 410073)
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| 摘要: |
| 针对精确测量薄层厚度的要求，本文提出一种新的同态信号处理的方法，这种方法在于得出被测信号能量谱ES的对数导数的付里叶反变换的包络。仿真结果表明，估计值与实际值非常相近。 |
| 关键词: 同态信号处理 能量谱 付里叶变换 |
| DOI： |
| 投稿日期：1993-11-25 |
| 基金项目: |
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| A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers |
| Li Suzhi, Yang Jianhua |
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(The Department of Electronic Technology，NUDT，Changsha，410073)
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| Abstract: |
| A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers. The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum (ES) of the measured signal. Simulations show excellent agreement between estimated and actual values. |
| Keywords: homomorphic signal processing energy spectrum Fourier transform |
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