引用本文: | 李素芝,杨建华.精确测量薄层厚度的同态信号处理方法[J].国防科技大学学报,1994,16(2):77-81.[点击复制] |
Li Suzhi,Yang Jianhua.A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers[J].Journal of National University of Defense Technology,1994,16(2):77-81[点击复制] |
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精确测量薄层厚度的同态信号处理方法 |
李素芝, 杨建华 |
(国防科技大学 电子技术系 湖南 长沙 410073)
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摘要: |
针对精确测量薄层厚度的要求,本文提出一种新的同态信号处理的方法,这种方法在于得出被测信号能量谱ES的对数导数的付里叶反变换的包络。仿真结果表明,估计值与实际值非常相近。 |
关键词: 同态信号处理 能量谱 付里叶变换 |
DOI: |
投稿日期:1993-11-25 |
基金项目: |
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A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers |
Li Suzhi, Yang Jianhua |
(The Department of Electronic Technology,NUDT,Changsha,410073)
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Abstract: |
A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers. The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum (ES) of the measured signal. Simulations show excellent agreement between estimated and actual values. |
Keywords: homomorphic signal processing energy spectrum Fourier transform |
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