| 引用本文: | 戴一帆,王新峰,吴宇列.超精密气浮式电容传感器系统.[J].国防科技大学学报,1999,21(5):91-94.[点击复制] |
| Dai Yifan,Wang Xinfeng,Wu Yulie.Ultraprecision Air Bearing Capacitive Sensor System[J].Journal of National University of Defense Technology,1999,21(5):91-94[点击复制] |
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| 超精密气浮式电容传感器系统 |
| 戴一帆, 王新峰, 吴宇列 |
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(国防科技大学 机械电子工程与仪器系 湖南 长沙 410073)
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| 摘要: |
| 介绍了一种高精度、高分辨率的超精密气浮式电容传感器。该系统将具有方形导轨的气浮测头和超小型电容传感器结合在一起, 既保证了测头的高分辨率, 又体现了电容传感器的高精度、高频响的特点, 是一种较好的用于超精密接触测量的测量系统。 |
| 关键词: 气浮测头, 接触测量, 电容传感器 |
| DOI： |
| 投稿日期：1999-03-01 |
| 基金项目:国家部委项目资助 |
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| Ultraprecision Air Bearing Capacitive Sensor System |
| Dai Yifan, Wang Xinfeng, Wu Yulie |
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(Department of Mechatronics and Instrumentation, NUDT, Changsha, 410073)
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| Abstract: |
| This paper presents an ultraprecision air bearing capacitive sensor with high resolution. It combines the air bearing gauge head with a square guideway with the microminiature capacitive sensor, ensuring high accuracy and high frequence response It's suitable for ultraprecision contact measurement. |
| Keywords: air bearing gauge head, contact measurement, capacitive sensor |
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