| 引用本文: | 丁衡高,袁祖武.微机电系统技术的实际应用——微型仪器.[J].国防科技大学学报,2000,22(2):90-94.[点击复制] |
| DING Henggao,YUAN Zuwu.The Typical Application of MEMS-Micro-Instruments[J].Journal of National University of Defense Technology,2000,22(2):90-94[点击复制] |
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| 微机电系统技术的实际应用——微型仪器 |
| 丁衡高, 袁祖武 |
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(总装备部 北京 100034)
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| 摘要: |
| 微机电系统被普遍认为是一项面向21世纪的可以广泛应用的新兴技术, 作为其实际应用的微型仪器, 具有传统仪器无可比拟的优势。从微型仪器入手, 分别介绍了其概念、特点和市场应用, 并在最后阐述了对微型仪器的几点认识。 |
| 关键词: 微机电系统 微型仪器 |
| DOI： |
| 投稿日期：1999-12-28 |
| 基金项目: |
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| The Typical Application of MEMS-Micro-Instruments |
| DING Henggao, YUAN Zuwu |
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(General Equipment Headquarters of PLA, Beijing 100034, China)
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| Abstract: |
| MEMS is widely considered as one of booming new technologies, and as its typical application, micro-instruments have unparalled advantage compared with traditional instruments, this article outlined the concept, characteristics and its application, some personal viewpoints about micro-instruments are forwarded. |
| Keywords: MEMS(Micro Electronic Mechanical System) micro-instrument |
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