| 引用本文: | 吕海宝,徐涛,杨华勇,等.双级闪耀光栅位移精密测量的傅里叶分析.[J].国防科技大学学报,2000,22(3):96-99.[点击复制] |
| LU Haibao,XU Tao,YANG Huayong,et al.Fourier Analysis for Precision Displacement Measurement with a Doubly Blazed Reference Grating[J].Journal of National University of Defense Technology,2000,22(3):96-99[点击复制] |
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| 双级闪耀光栅位移精密测量的傅里叶分析 |
| 吕海宝, 徐涛, 杨华勇, 曹聚亮, 苏绍景, 王刚 |
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(国防科技大学 机电工程与自动化学院, 湖南 长沙 410073)
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| 摘要: |
| 采用傅里叶光学的理论对双级闪耀光栅位移测量原理进行了分析, 导出了经光栅付衍射后光波的振幅和强度表达式, 得出了位移测量公式, 并指出形成的莫尔条纹为近乎理想的对比度极强的双光束干涉条纹, 该结论与Post D 的有关理论和实验结果完全一致。 |
| 关键词: 傅里叶分析 闪耀光栅 位移测量 莫尔条纹 |
| DOI： |
| 投稿日期：1999-12-28 |
| 基金项目:国防重点实验室基金资助项目(99JS53.8.1.KG0117) |
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| Fourier Analysis for Precision Displacement Measurement with a Doubly Blazed Reference Grating |
| LU Haibao, XU Tao, YANG Huayong, CAO Juliang, SU Shaojing, WANG Gang |
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(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| In this paper, the fundamental principle of precision displacement measurement with a doubly blazed grating is analyzed in detail by means of Fourier Optics. The mathematical expressions about the amplitude and the intensity of diffracted light are derived, and the measurement formula is presented. At the same time it is indicated that moire fringes are nearly perfect two-beam interference fringes with superb contrast. These conclusions are consistent with the theoretical and experimental results given by Post D, and helpful to further development of the measurement principle. |
| Keywords: Fourier analysis blazed grating displacement measurement moire fringes |
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