| 引用本文: | 王宪平,李圣怡.直线度误差分离方法的误差分析.[J].国防科技大学学报,2000,22(3):100-104.[点击复制] |
| WANG Xianping,LI Shengyi.An Analysis of the Accuracy for Strainghtness Measurement with EST Method[J].Journal of National University of Defense Technology,2000,22(3):100-104[点击复制] |
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| 直线度误差分离方法的误差分析 |
| 王宪平, 李圣怡 |
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(国防科技大学 机电工程与自动化学院, 湖南 长沙 410073)
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| 摘要: |
| 在研究精密和超精密加工技术的发展对直线度误差分离技术所提出的新要求的基础上, 定量分析了传感器初始对准误差, 忽略摆角误差和传感器漂移特性差异在时域和频域直线度误差分离方法中造成的误差, 同时指出了频域方法中权系数对测量误差的放大作用。并讨论了一些消除误差的方法。最后由此得出两点法与三点法相结合的组合方法是最适用于超精密直线度测量的误差分离方法的结论。 |
| 关键词: 直线度 误差分离方法 误差分析 |
| DOI： |
| 投稿日期：1999-09-01 |
| 基金项目:国家部委基金资助项目(18.6.2.1) |
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| An Analysis of the Accuracy for Strainghtness Measurement with EST Method |
| WANG Xianping, LI Shengyi |
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(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| Based on the study of the new requirements of the precision and ultraprecision machine technique for the error separation technique of straightness measurement, this paper analyzes quantificationally the error introduced into the time domain and frequency domain EST results by the misalignment of sensors, the neglect of yaw angle in sequential two-point method and the difference of drifting of these sensors. This paper also describes quantificationally the magnifying ability for measurement errors of the factors W(k) in frequency domain EST methods. Some measures were taken to reduce this influence. The conclusion that sequential two-point method is the best fit method for straightness measurement was arrived at the end of this paper. |
| Keywords: straightness error separation technique error analysis |
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