| 引用本文: | 吴学忠,吴宇列,李圣怡.平面二自由度并联执行机构的设计与实现.[J].国防科技大学学报,2001,23(1):40-43.[点击复制] |
| WU Xuezhong,WU Yulie,LI Shengyi.A Design of the Parallel X-Y Manipulator for High Speed Application[J].Journal of National University of Defense Technology,2001,23(1):40-43[点击复制] |
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| 平面二自由度并联执行机构的设计与实现 |
| 吴学忠, 吴宇列, 李圣怡 |
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(国防科技大学 机电工程与自动化学院，湖南 长沙 410073)
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| 摘要: |
| 介绍了作者研制的一种用于半导体制造设备上的x-y并联执行机构。通过增加一个冗余运动链，使得该机构在工作空间内没有奇异点。该机构的最大特点是可以大大减少现有机构的体积，并具有较高的刚度，可以在高速运动条件下具有较高的运动精度和跟踪性能。实验结果表明，该系统的轨迹跟踪误差均低于0.5mm。 |
| 关键词: 并联执行机构 奇异性 冗余 |
| DOI： |
| 投稿日期：2000-10-12 |
| 基金项目:海外青年学者合作研究基金(50029501) |
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| A Design of the Parallel X-Y Manipulator for High Speed Application |
| WU Xuezhong, WU Yulie, LI Shengyi |
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(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| A parallel x-y manipulator system for an epoxy writing application is developed. The best advantage of the system is a significant reduction in size of the present epoxy writing system. The other primary advantage is to increase rigidity of the parallel mechanism, thus ensur faster operation with higher accuracy and improved tracking performance. It shows that the tracking error is smaller than 0.5mm. |
| Keywords: parallel manipulator singularity redundancy |
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