| 引用本文: | 王娟,张长瑞,冯坚.溶胶—凝胶法制备SiO2气凝胶薄膜溶胶粘度的研究.[J].国防科技大学学报,2003,25(6):30-34.[点击复制] |
| WANG Juan,ZHANG Changrui,FENG Jian.Viscosity of SiO2 Sol for Preparing SiO2 Aerogel Film by Sol-gel Method[J].Journal of National University of Defense Technology,2003,25(6):30-34[点击复制] |
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| 溶胶—凝胶法制备SiO2气凝胶薄膜溶胶粘度的研究 |
| 王娟, 张长瑞, 冯坚 |
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(国防科技大学 航天与材料工程学院，湖南 长沙 410073)
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| 摘要: |
| 用低介电常数介质薄膜代替传统的SiO2薄膜是减小ULSI中互连延迟、串扰和能耗的有效方法。SiO2气凝胶薄膜因具有低介电常数、低密度、高热稳定性等性能而成为ULSI中金属间介质的理想材料。以正硅酸乙酯为原料，采用酸/碱两步溶胶—凝胶法结合匀胶和超临界干燥等工艺在硅片上成功制备了SiO2气凝胶薄膜。研究了不同配比的SiO2溶胶粘度随时间的变化；确定了适于匀胶的溶胶的粘度范围为9～15mPa·s；发现溶胶粘度在9～15mPa·s的时间随溶剂异丙醇（IPA）用量的增加和NH4OH的减少而延长。 |
| 关键词: SiO2气凝胶薄膜 粘度 溶胶—凝胶 低介电常数 |
| DOI： |
| 投稿日期：2003-05-08 |
| 基金项目:国家部委预研项目(41312040307) |
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| Viscosity of SiO2 Sol for Preparing SiO2 Aerogel Film by Sol-gel Method |
| WANG Juan, ZHANG Changrui, FENG Jian |
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(College of Aerospace and Materials Engineering, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| Low dielectric constant material which substitutes for conventional SiO2 thin film as intermetal dielectric (IMD) is imperative for the reduction of interconnect resistance/capacitance(RC), cross talk and power consumption. SiO2 aerogel film with unique properties such as ultra-low dielectric constant, low density and high thermal stability is one of the most possible candidates as IMD. SiO2 aerogel films on a silicon wafer have been synthesized via a process of sol-gel, spin coating and supercritical drying. SiO2 sol is prepared using a two-step procedure with acid/base as catalyst to investigate the effect of different amount of isopropanol(IPA) and NH4OH on sol viscosity which is important for spin coating and the microstructure of SiO2 aerogel film. The optimized viscosity of SiO2 sol is in the range of 9～15 mPa·s. It is found that the time of viscosity in 9～15 mPa·s becomes longer as IPA increases or NH4OH decreases. |
| Keywords: SiO2 aerogel film viscosity Sol-gel low dielectric constant |
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