| 引用本文: | 何焰兰,孙全,吕志辉.InSb纳米颗粒的制备与原子力显微镜.[J].国防科技大学学报,2004,26(2):17-20.[点击复制] |
| HE Yanlan,SUN Quan,LU Zhihui.InSb Nano-pellet Preparation and the Atomic Force Microscope[J].Journal of National University of Defense Technology,2004,26(2):17-20[点击复制] |
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| InSb纳米颗粒的制备与原子力显微镜 |
| 何焰兰, 孙全, 吕志辉 |
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(国防科技大学 理学院，湖南 长沙 410073)
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| 摘要: |
| 为进一步研究半导体纳米材料的物理特性，用真空沉积的方法在SiO2基片上制备了纳米InSb颗粒膜。用原子力显微镜扫描样品表面的分析显示，纳米InSb颗粒均匀地分布在SiO2基片表面。实验结果表明通过改变镀膜时间，可以得到具有不同颗粒尺寸的InSb纳米颗粒。 |
| 关键词: 纳米InSb颗粒 真空蒸发沉积 原子力显微镜 |
| DOI： |
| 投稿日期：2003-11-01 |
| 基金项目:国防科技大学预研基金项目 |
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| InSb Nano-pellet Preparation and the Atomic Force Microscope |
| HE Yanlan, SUN Quan, LU Zhihui |
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(College of Science, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| In order to further research the physics characteristics of nano-semiconductor, we get the nanometer size InSb particle films deposited on the SiO2 substrate by using vacuum evaporation. The atomic force microscope was applied to survey the surface morphology of the films. The results show that the films are composite of nano-particles of InSb. From the analysis of the scanning images of these samples, the result of the experiment proves that by changing the plating time, different sizes of InSb particle can be formed. |
| Keywords: InSb nano-pellet vacuum evaporation deposition atomic force microscope |
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