| 引用本文: | 李圣怡,刘宗林,吴学忠.微加速度计研究的进展.[J].国防科技大学学报,2004,26(6):34-37.[点击复制] |
| LI Shengyi,LIU Zonglin,WU Xuezhong.Developments of Microaccelerometer Research[J].Journal of National University of Defense Technology,2004,26(6):34-37[点击复制] |
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| 微加速度计研究的进展 |
| 李圣怡, 刘宗林, 吴学忠 |
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(国防科技大学 机电工程与自动化学院，湖南 长沙 410073)
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| 摘要: |
| 介绍了微加速度计的基本原理以及国内外常见的各种微加速度计的结构形式,包括压电式、电容式、扭摆式、隧道式等，分析了这些传感器的基本特点，总结微加速度计发展中存在的一些问题，并提出一些解决关键问题的措施，预测微加速度计未来的发展趋势。 |
| 关键词: 微加速度计 微机电系统 制作工艺 |
| DOI： |
| 投稿日期：2004-07-02 |
| 基金项目:国家自然科学基金资助项目(50375154) |
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| Developments of Microaccelerometer Research |
| LI Shengyi, LIU Zonglin, WU Xuezhong |
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(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| The basic principle of microaccelerometers is explained and several kinds of them with different structures are investigated, including piezoelectric type, capacitive type, torsional-cantilever type, tunneling type, etc. The characteristics of those types are introduced. Some focused problems are pointed out. Furthermore, several methods and advices are offered to improve the property of microaccelerometers. |
| Keywords: microaccelerometer MEMS fabrication technology |
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