| 引用本文: | 吴冬良,戴一帆,王贵林,等.离子束加工误差对散射损失的影响研究.[J].国防科技大学学报,2009,31(6):84-88.[点击复制] |
| WU Dongliang,DAI Yifan,WANG Guilin,et al.Influence of the Fabrication Error in IBF on the Scattering Loss[J].Journal of National University of Defense Technology,2009,31(6):84-88[点击复制] |
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| 离子束加工误差对散射损失的影响研究 |
| 吴冬良, 戴一帆, 王贵林, 周林, 焦长君 |
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(国防科技大学 机电工程与自动化学院，湖南 长沙 410073)
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| 摘要: |
| 离子束加工(Ion Beam Figuring, IBF)去除函数对加工残差具有重要的影响，而加工残差引起的表面散射则导致光学性能发生变化。为了减小加工残差对光学性能的影响，利用基于CCOS成形原理的离子束加工仿真程序对光学镜面进行修形，分析不同去除函数宽度对散射损失(Ratio of Scattering Loss, RSL)指标的影响。通过研究可知，随着去除函数宽度的减小，加工残差对散射损失的影响越来越小。因此，根据加工残差对RSL指标的影响程度以及RSL指标要求，可以合理选择去除函数宽度，从而在满足面形精度的同时，优化加工工艺。 |
| 关键词: 去除函数 加工残差 散射损失比 离子束加工 CCOS |
| DOI： |
| 投稿日期：2009-05-12 |
| 基金项目:新世纪优秀人才计划项目(NCET)；国家自然科学基金资助项目(50775215) |
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| Influence of the Fabrication Error in IBF on the Scattering Loss |
| WU Dongliang, DAI Yifan, WANG Guilin, ZHOU Lin, JIAO Changjun |
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(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China)
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| Abstract: |
| The removal function in ion beam figuring (IBF) exerts great influence on the fabrication residual error of optical surface, so that the performance of optical surface is changed because of the surface scattering induced by the fabrication residual error. In order to reduce the influence of the fabrication residual error on the optical performance, the IBF simulation procedure based on the computer controlled optical surfacing (CCOS) technique was used in surfacing the optical mirrors, and the influence of the removal function width on the ratio of scattering loss (RSL) was analyzed. It was shown that the influence of the fabrication residual error on the RSL declines with decrease of the removal function width. Thus the removal function width can be chosen reasonably according to the influence of the fabrication residual error on the RSL and the requirement of RSL index, and the processing technique can be optimized under the condition of satisfying the surface accuracy requirement of the optical mirrors. |
| Keywords: removal function fabrication residual error ratio of scattering loss ion beam figuring CCOS |
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