| 引用本文: | 廖文林,戴一帆,周林,等.离子束抛光加工矩形离轴非球面镜.[J].国防科技大学学报,2011,33(1):100-104.[点击复制] |
| LIAO Wenlin,DAI Yifan,ZHOU Lin,et al.Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors[J].Journal of National University of Defense Technology,2011,33(1):100-104[点击复制] |
|
| |
|
|
| 本文已被：浏览 9066次 下载 5973次 |
| 离子束抛光加工矩形离轴非球面镜 |
| 廖文林, 戴一帆, 周林, 王建敏, 袁征, 解旭辉 |
|
(国防科技大学 机电工程与自动化学院，湖南 长沙 410073)
|
| 摘要: |
| 采用一种简单的方法使用线性三轴离子束系统实现了矩形离轴非球面镜的抛光加工。根据离子束材料去除机理，分析了去除函数的法向材料去除特性，并且以去除函数束径、峰值去除速率和体积去除速率为指标，评价了入射角的小扰动鲁棒性。利用相关的分析和实验结果，对矩形离轴镜的抛光加工进行了合理的简化，并在自行研制的离子束抛光机床上进行了修形试验，经过多次迭代加工后，总计用时584min，其面形精度均方根误差RMS由初始的0.295λ，提高到0.046λ，收敛率达到了6.4。实验结果表明，利用离子束抛光独特的材料去除特性，能够有效地改善面形精度，可以对非球面镜进行高效高精度修形。 |
| 关键词: 离子束抛光 离轴非球面 去除函数 材料去除特性 |
| DOI： |
| 投稿日期：2010-08-06 |
| 基金项目:国家自然科学基金资助项目(50775215，50975281) |
|
| Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors |
| LIAO Wenlin, DAI Yifan, ZHOU Lin, WANG Jianmin, YUAN Zheng, XIE Xuhui |
|
(College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073， China)
|
| Abstract: |
| A simple method of ion beam figuring was successfully employed for processing rectangular off-axis aspheric mirror. Based on the material removal mechanism, the normal removal characteristic was analyzed. Beam diameter, peak removal rate and volume removal rate are the three factors to evaluate the robustness of removal function with respect to little disturbance of incidence angle. According to the results of analyses and experiments, the method of processing rectangular off-axis aspheric mirror by ion beam figuring was appropriately simplified. To validate the feasibility of this method, an off-axis aspheric ellipsoidal mirror was processed in our IBF system. With three iterations of 200 minutes, the surface error was reduced from 0.294λ RMS to 0.05λ RMS and the total convergence ratio was 10. The experimental results indicate that IBF has inimitable material removal characteristics, can effectively improve surface precision and realize the rapid processing of ultra-precision rectangular off-axis aspheric mirror. |
| Keywords: ion beam figuring off-axis asphere mirror removal function material removal characteristics |
|
|
|
|
|
