| 引用本文: | 田武刚,胡佳飞,潘孟春,等.MEMS磁力线聚集和垂动调制磁场传感器.[J].国防科技大学学报,2014,36(4):129-133 ,168.[点击复制] |
| TIAN Wugang,HU Jiafei,PAN Mengchun,et al.Magnetic field sensors with MEMS magnetic flux concentration and vertical motion modulation[J].Journal of National University of Defense Technology,2014,36(4):129-133 ,168[点击复制] |
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| MEMS磁力线聚集和垂动调制磁场传感器 |
| 田武刚, 胡佳飞, 潘孟春, 赵建强, 胡靖华 |
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(国防科技大学 机电工程与自动化学院， 湖南 长沙 410073)
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| 摘要: |
| 针对巨磁阻和磁隧道结等磁阻元件的1/f噪声，提出一种采用微机电系统的磁力线聚集和垂动调制磁场传感器。通过将被测磁场从低频转移到几kHz，实现对磁场的DC/AC转化，从而减小了磁阻元件的1/f噪声。基于该方案采用多层膜巨磁阻元件AA002制作了磁场传感器样品，并进行了实验测试，结果表明：磁传感器样品的调制效率达到了19.3%，超过了已有的其他各种调制方案，同时低频磁场的探测能力达到120pT/√Hz，相比巨磁阻元件AA002提高了40多倍。 |
| 关键词: 1/f 噪声 调制效率 磁力线聚集器 磁场传感器 微机电系统 |
| DOI：10.11887/j.cn.201404022 |
| 投稿日期：2013-12-02 |
| 基金项目:国家自然科学基金资助项目（51175507）；教育部高等学校博士学科点专项科研基金资助项目（20124307120012） |
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| Magnetic field sensors with MEMS magnetic flux concentration and vertical motion modulation |
| TIAN Wugang, HU Jiafei, PAN Mengchun, ZHAO Jianqiang, HU Jinghua |
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(College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China)
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| Abstract: |
| 1/f noise is one of the main noise sources of giant magnetoresistance (GMR) and magnetic tunnel junction (MTJ), which can cause intrinsic detection limit at low frequency. Based on this fact, a sort of magnetic field sensor using microelectromechanical system (MEMS) flux concentrator and flux vertical motion modulation is proposed. The frequency of the measurement magnetic field was shifted from low to kHz ranges, which realized the translation of measurement magnetic field from DC to AC, thus 1/f noise of magnetoresistance element was mitigated. A prototype sensor was fabricated using multi-layered GMR element AA002, and the test was done. The results showed that the modulation efficiency achieves the levle of 19.3%, which exceeds the efficiency of most existing sensors with other modulation schemes, and the low frequency magnetic detection ability is improved to 120pT/√Hz, which is enhanced by 40 times compared with that of the GMR element AA002. |
| Keywords: 1/f noise modulation efficiency magnetic flux concentrator magnetic field sensor microelectromechanical system (MEMS) |
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