| 引用本文: | 田富竟,李圣怡,尹自强,等.快轴伺服系统的设计与性能测试.[J].国防科技大学学报,2014,36(4):152-157.[点击复制] |
| TIAN Fujing,LI Shengyi,YIN Ziqiang,et al.Design and performance testing of fast axis servo for diamond turning[J].Journal of National University of Defense Technology,2014,36(4):152-157[点击复制] |
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| 快轴伺服系统的设计与性能测试 |
| 田富竟1,2, 李圣怡1,2, 尹自强1,2, 李宁1,2 |
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(1.国防科技大学 机电工程与自动化学院，湖南 长沙 410073;2.
2.超精密加工技术湖南省重点实验室，湖南 长沙 410073)
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| 摘要: |
| 研制了用于加工非回转对称光学元件的快轴伺服系统（FAS）的整体结构及其控制系统，系统具备较大行程和高工作频率，最大的行程可达到30mm。系统采用了音圈电机驱动的气体静压轴承技术、线性电流放大器、高分辨率编码器以及高速控制系统。对不同截面形状气浮导轨的静、动态特性进行了有限元分析。系统采用PID反馈和速度/加速度前馈控制方法来改善系统的动态性能。FAS系统0.1mm阶跃响应的上升时间为2ms，最大超调量为0.4%，稳态时间为4ms，对铝件进行超精密切削实验，表面粗糙度可达Ra24nm，实验结果表明系统具有较好的动态和切削特性。 |
| 关键词: 快轴伺服系统 气浮导轨 音圈电机 PID和前馈控制器 |
| DOI：10.11887/j.cn.201404026 |
| 投稿日期：2014-03-20 |
| 基金项目:国家自然科学基金面上项目（51075393） |
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| Design and performance testing of fast axis servo for diamond turning |
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(College of Mechantranics and Automation, National University of Defense Technology, Changsha 410073, China)
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| Abstract: |
| The configuration and control system of a linear long stroke and high frequency fast axis servo (FAS) is developed for the production of asymmetric optics. The maximum stroke of the FAS is 30mm. The proposed Fast Axis Servo (FAS) utilizes the aerostatic bearings driven by a voice coil actuator, a custom linear current amplifier, a high-resolution encoder and a high-speed control system. The static and dynamic characteristic of air slide with different cross-sectional shapes was studied by the finite element method. A control strategy consists of a proportional, integral and derivative (PID) feedback controller and velocity/acceleration feed forward controller was implemented to accommodate the changed system dynamics. The 0.1mm step response was applied on the FAS, the rise time is 2ms, the over shoot is 0.4%, the settling time is 4ms. An aluminum part with the super precision cutting has a surface finish value 24nm Ra. The experiment results indicate that the FAS displays satisfactory dynamic and cutting performance. |
| Keywords: fast axis servo air slide voice coil actuator PID and feedforward controller |
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