阻变存储器:从物理机理到集成应用
作者:
作者单位:

1.复旦大学 集成芯片与系统全国重点实验室, 上海 200433 ; 2.复旦大学 集成电路与微纳电子创新学院, 上海 200433 ; 3.复旦大学 芯片与系统前沿技术研究院, 上海 200433

作者简介:

刘琦(1980—),男,安徽宿州人,教授,博士,博士生导师,E-mail:qi_liu@fudan.edu.cn

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中图分类号:

TN43

基金项目:

国家自然科学基金资助项目(T2293732, 62374040)


Resistive random-access memory: from physical mechanisms to integration and applications
Author:
Affiliation:

1.State Key Laboratory of Integrated Chips and Systems, Fudan University, Shanghai 200433 , China ;2.College of Integrated Circuits and Micro-Nano Electronics, Fudan University, Shanghai 200433 , China ;3.Frontier Institute of Chip and System, Fudan University, Shanghai 200433 , China

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    摘要:

    阻变存储器(resistive random-access memory, RRAM)作为最具潜力的新型非易失性存储技术之一,因其结构简单、功耗低、速度快及良好的可扩展性,正成为突破传统“存算分离”架构下数据搬运瓶颈的重要方向。然而,其大规模应用仍受限于开关均匀性、循环耐久性及集成可靠性等挑战。本文系统综述了RRAM在机理解析、性能调控、工艺集成与系统应用方面的研究进展。从阻变机制出发,总结了工艺优化及电学编程策略改善器件一致性和可靠性的关键方法;在集成层面,系统回顾了RRAM在先进工艺节点下与互补金属氧化物半导体工艺兼容性的探索,以及高密度三维集成方面的最新进展;在应用方面,重点分析了RRAM在高能效存算一体、类脑计算、智能感知及安全芯片中的发展趋势。面向未来,本文指出需在机理-材料-架构层面开展跨尺度协同创新,以支撑智能计算与信息技术融合发展中的战略目标。

    Abstract:

    RRAM (resistive random-access memory) has emerged as a promising non-volatile memory technology due to its simple device structure, low power consumption, fast switching speed, and excellent scalability, addressing the data movement bottleneck in traditional compute-memory separation architectures. However, challenges in switching uniformity, cycling endurance, and integration reliability hinder its widespread adoption. This review systematically examined recent advances in RRAM, covering mechanism analysis, performance modulation, process integration technologies, and innovative applications. Starting from resistive switching mechanisms, key approaches based on process optimization and electrical programming strategies were summarized to enhance device uniformity and reliability. At the integration level, recent advances in CMOS(complementary metal-oxide-semiconductor) compatibility at advanced technology nodes and high-density 3D(three-dimensional) integration of RRAM were systematically reviewed. In terms of applications, the development trends of RRAM in high-energy-efficiency in-memory computing, neuromorphic computing, intelligent sensing, and secure chips were analyzed in detail. Towards the future, synergetic cross-scale innovation spanning mechanism, material, and architectural levels were emphasized, supporting the strategic goals of the integrated development of intelligent computing and information technologies.

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刘琦, 陈超, 陈沛, 等. 阻变存储器: 从物理机理到集成应用[J]. 国防科技大学学报, 2026, 48(2): 331-348.

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  • 收稿日期:2025-12-24
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  • 在线发布日期: 2026-04-08
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