Developments of Microaccelerometer Research
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    Abstract:

    The basic principle of microaccelerometers is explained and several kinds of them with different structures are investigated, including piezoelectric type, capacitive type, torsional-cantilever type, tunneling type, etc. The characteristics of those types are introduced. Some focused problems are pointed out. Furthermore, several methods and advices are offered to improve the property of microaccelerometers.

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LI Shengyi, LIU Zonglin, WU Xuezhong. Developments of Microaccelerometer Research[J]. Journal of National University of Defense Technology,2004,26(6):34-37.

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History
  • Received:July 02,2004
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  • Online: May 08,2013
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