The effect of the three kinds of material on the removal function is studied. The considering properties of the removal function include the removal profile, the removal rate, the stability of the removal function and the surface topography. A series of experiments have been done to the perfect properties of the removal function. The experiments were done on the AOCMT machine tool and the contact measurement system developed by ourselves. The results were presented as follows. Polyurethane is used in the step of the rough polish. Polishing cloth is used in the step of the finishing polish. Polishing pitch (55# polishing pitch by GuGolz Corporation ) is used in the step of the surface treatment or the finishing polish.