Stealth aircraft has gradually become a great power, and will continue to play an important role, making stealth technology become the key technology of aircraft design. RCS(radar cross section) measurement of stealth aircraft is a necessary step to design, manufacture and maintain stealth aircraft. The basic process of RCS measurement of stealth aircraft was reviewed from three aspects:RCS test of scaled model, outdoor RCS test of full-scale aircraft and indoor near-field test of full-scale aircraft, the theoretical basis of RCS near-field measurement of stealth aircraft was summarized, and the near-field RCS measurement technology with imaging diagnosis function was analyzed intensively. The development trend and key technologies of stealth aircraft RCS measurement were prospected, which is helpful to have a general understanding of RCS measurement of stealth aircraft and grasp the development direction of RCS measurement.