A review of long-range high-resonant-frequency compliant nanopositioning technology
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TP215

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    Abstract:

    With the growing demand for nanometer-scale precision in scientific research and industrial production, compliant nanopositioning technology capable of generating and controlling motion with nanometer-level precision has emerged as a key enabler for high-end equipment. The positioning range and resonant frequency determine the workspace and dynamic response of nanopositioning systems. However, there exists an inherent trade-off between them, making it difficult to optimize both simultaneously. This paper focuses on the compliant nanopositioning technologies for achieving long range and high resonant frequency. From the perspectives of system configuration and key performance indicators, the intrinsic mechanism underlying the trade-off between positioning range and resonant frequency was introduced. Furthermore, the efforts and practices of researchers worldwide in addressing the trade-off, including the design of nanopositioners based on different actuation methods, as well as related control issues and control strategies, were reviewed. The current research status was analyzed, and future development trends were discussed, providing useful references for the advancement of high-end equipment and precision instruments in our country.

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History
  • Received:December 09,2025
  • Revised:March 31,2026
  • Adopted:April 07,2026
  • Online: April 17,2026
  • Published:
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